Authors: Thomas Gutt, Hans Ehm, Germar Schneider, Prof. Dr. Eng. George Dimitrakopoulos
Title: Productive4.0 - Holistic Innovations to Open the Potentials of Digital Industry
Brief description:
Simulation is one of the most used approaches to analyze semiconductor manufacturing systems. However,most simulation models are designed for single-use applications and study a limited set of problems that are not reusable afterwards. Recently, in order to overcome this problem, the idea to develop a generic wafer fab simulation model has emerged. This paper proposes a generic, data-driven simulation model to evaluate and analyze a wide range of problems arising in modern semiconductor manufacturing systems. We discuss the issues related to the genericity of such a simulation model and the data and semantic integration issues faced by users.
Place of Publication: International Conference on Compound Semiconductor Manufacturing Technology CS Mantech Conference Monterey, California USA, 2022
